Accurate localization microscopy by intrinsic aberration calibration

A standard paradigm of localization microscopy involves extension from two to three dimensions by engineering information into emitter images, and approximation errors resulting the field dependence optical aberrations. We invert this paradigm, introducing concept fully exploiting latent intrinsic aberrations comprehensive calibration an ordinary microscope, enabling accurate single emitters in throughout ultrawide deep field. To complete extraction spatial microscale bodies ranging imaging substrates microsystem technologies, we introduce a synergistic rigid transformation positions multiple dimensions, improving precision, testing accuracy, yielding measurements six degrees freedom. Our study illuminates challenge aberration effects microscopy, redefines as opportunity for accurate, precise, localization, elucidates performance reliability complex microelectromechanical system.